JPS6245986A - リリ−フバルブ - Google Patents

リリ−フバルブ

Info

Publication number
JPS6245986A
JPS6245986A JP18529485A JP18529485A JPS6245986A JP S6245986 A JPS6245986 A JP S6245986A JP 18529485 A JP18529485 A JP 18529485A JP 18529485 A JP18529485 A JP 18529485A JP S6245986 A JPS6245986 A JP S6245986A
Authority
JP
Japan
Prior art keywords
valve
cryopump
pressure
internal pressure
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18529485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312234B2 (en]
Inventor
Shinji Osako
信治 大迫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP18529485A priority Critical patent/JPS6245986A/ja
Publication of JPS6245986A publication Critical patent/JPS6245986A/ja
Publication of JPH0312234B2 publication Critical patent/JPH0312234B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP18529485A 1985-08-23 1985-08-23 リリ−フバルブ Granted JPS6245986A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18529485A JPS6245986A (ja) 1985-08-23 1985-08-23 リリ−フバルブ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18529485A JPS6245986A (ja) 1985-08-23 1985-08-23 リリ−フバルブ

Publications (2)

Publication Number Publication Date
JPS6245986A true JPS6245986A (ja) 1987-02-27
JPH0312234B2 JPH0312234B2 (en]) 1991-02-19

Family

ID=16168339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18529485A Granted JPS6245986A (ja) 1985-08-23 1985-08-23 リリ−フバルブ

Country Status (1)

Country Link
JP (1) JPS6245986A (en])

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4968487A (en) * 1986-09-02 1990-11-06 Fumakilla Limited Heat fumigation apparatus
JPH02298677A (ja) * 1989-05-12 1990-12-11 Mitsubishi Electric Corp クライオポンプのリリーフ弁排気構造
US5222186A (en) * 1991-12-06 1993-06-22 Globol Gmbh Electrical apparatus for vaporizing of active substances
US5290546A (en) * 1988-02-10 1994-03-01 Earth Chemical Co., Ltd. Method for thermal vaporization of chemical
US5484086A (en) * 1993-04-20 1996-01-16 Pu; Kuan H. Perfume gas generating device
CN102588247A (zh) * 2011-01-17 2012-07-18 住友重机械工业株式会社 低温泵及真空阀装置
GB2636985A (en) * 2023-12-19 2025-07-09 Edwards Vacuum Llc Detecting displacer position in a cryopump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7369071B2 (ja) 2020-03-18 2023-10-25 住友重機械工業株式会社 クライオポンプおよびクライオポンプの制御方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112399U (en]) * 1979-01-31 1980-08-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112399U (en]) * 1979-01-31 1980-08-07

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4968487A (en) * 1986-09-02 1990-11-06 Fumakilla Limited Heat fumigation apparatus
US5290546A (en) * 1988-02-10 1994-03-01 Earth Chemical Co., Ltd. Method for thermal vaporization of chemical
JPH02298677A (ja) * 1989-05-12 1990-12-11 Mitsubishi Electric Corp クライオポンプのリリーフ弁排気構造
US5222186A (en) * 1991-12-06 1993-06-22 Globol Gmbh Electrical apparatus for vaporizing of active substances
US5484086A (en) * 1993-04-20 1996-01-16 Pu; Kuan H. Perfume gas generating device
CN102588247A (zh) * 2011-01-17 2012-07-18 住友重机械工业株式会社 低温泵及真空阀装置
GB2636985A (en) * 2023-12-19 2025-07-09 Edwards Vacuum Llc Detecting displacer position in a cryopump

Also Published As

Publication number Publication date
JPH0312234B2 (en]) 1991-02-19

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